Electronic Imaging of Electronic Devices
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What is STEM EBIC?
Scanning Transmission Electron Microscope Electron Beam-Induced Current
STEM EBIC measures tiny currents produced in samples scanned with the STEM beam. Different current generation modes create contrast related to different electronic properties, including conductivity, electric field, charge density, and secondary electron yield. STEM EBIC enables high-resolution electronic contrast alongside the physical information provided by standard STEM imaging modes.
What can you image with STEM EBIC?
Local electronic and thermal signals in devices and materials
STEM EBIC reveals the electronic and thermal structure underlying device operation, degradation, and failure. Whether you are studying commercial semiconductors, like Si finFETs or GaN HEMTs, or next-generation memory systems, like ferroelectrics and resistive memory, STEM EBIC can likely show you something you haven't seen before. Applications range from basic research, metrology, early-stage prototype development, fabrication yield enhancement and quality assurance, and failure analysis.
Click here for more STEM EBIC publications.
Why NEI?
NEI's founders are the world's leading experts in STEM EBIC imaging. STEM EBIC has been around since the 1970's, but their recent developments have pioneered the field of Advanced STEM EBIC. These the developments include electronic imaging of various operating devices, SEEBIC, conductivity mapping, and temperature mapping, atomic resolution EBIC, and two-channel STEM EBIC (right) to differentiate between different EBIC contrast modes.
NEI's expertise in in situ sample preparation and STEM EBIC imaging and analysis can help reveal new and interesting contrast in virtually any sample.
NEI's Two-Channel STEM EBIC system is the only complete STEM EBIC solution on the market, and the only system capable of the Advanced STEM EBIC techniques described above. With current imaging resolution in the 10's of femtoAmps, it is the most sensitive STEM EBIC system ever developed.
Contact us to learn what NEI can show you.
NEI's Low Noise, Two-Channel STEM EBIC System is now available for most major TEM brands.
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