NEI's Two Channel STEM EBIC System
Includes EBIC-optimized TEM biasing holder, current amplifiers and signal routing, and power and signal conditioning electronics.
High sensitivity, low noise current measurements.
Quantitative standard EBIC and SEEBIC imaging.
Two indepedent EBIC channels:
Distinguish between EBIC modes.
Probe different device regions simultaneously.
Designed for compatibility with in situ biasing and heating experiments.
EBIC-compatible substrates for liftout, patterned heating/biasing, and wet transfer samples.
STEM EBIC Characterization
Nanoscale electronic and thermal imaging:
Mapping Conductivity, Electric field, Temperature, Work function.
TEM imaging and analysis
Sample Fabrication Services
Custom Si-based TEM biasing substrates:
Liftout chips for cross section samples.
Membrane chips for patterning devices and wet transfer of nanomaterials.
Electrically contacted cross sections
Custom nanoscale device fabrication:
Heating/biasing materials characterization platforms, prototype devices, test structures, etc.